Interference of parallel cylindrical Langmuir probes
نویسندگان
چکیده
منابع مشابه
The floating potential of cylindrical Langmuir probes
The formula normally used to calculate the space potential Vs from the measured floating potential V f is derived for plane probes and is erroneous when applied to cylindrical probes in the low-density plasmas (n,10 cm) used in industrial plasma processing. The plasma potential Vs is of interest because it determines the sheath drop which governs the energy of ions bombarding the walls or a sil...
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Particle-in-cell and hybrid electron-Boltzmann simulations of planar and cylindrical Langmuir probes are compared with various probe theories. Floating potentials for planar and cylindrical probes are calculated and significant deviations from the typical approximation used for argon discharges of 5Te are shown. The interpretation of simulated ion saturation currents by the orbital motion limit...
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The use of Langmuir probes for measuring plasma density is subject to uncertainty because the theories commonly used to interpret the data give widely differing results. This is especially troublesome in partially ionized plasmas used, for instance, in the semiconductor industry, since no existing theory adequately treats the case when there are a few collisions between ions and neutral atoms. ...
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Low-temperature, partially ionized plasmas are commonly used in industry for materials processing, and many of these are created by radiofrequency (RF) power. For the characterization of plasma sources, electrostatic probes are the easiest to use, but interpretation of the current-voltage (I – V) curves is not straightforward. The presence of strong RF pickup and neutral collisions further comp...
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We report on the use of an active Langmuir probe with three-harmonic compensation to diagnose rf discharge plasmas driven at 13.56 MHz. The plasma generates many harmonics on the fundamental, the first few being strongest. This gives a multi-harmonic rf voltage across the probe sheath that is removed by applying a rf signal to the probe that is matched both in amplitude and in phase for each ha...
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ژورنال
عنوان ژورنال: Physics of Plasmas
سال: 2001
ISSN: 1070-664X,1089-7674
DOI: 10.1063/1.1390332